Overview. - A : Numerical Simulation Systems. - 1. Numerical Simulation Systems. - 2. Process Simulation. - 3. Device Simulation. - 4. Parasitic Elements Simulation. - B : Applications and Case Studies. - 5. Methodology in Computer-Aided Design for Process and Device Development. - 6. SUPREM III Application. - 7. Simulation Techniques for Advanced Device Development. - 8. Drain-Induced Barrier Lowering in Short Channel Transistors. - 9. A Study of LDD Device Structure Using 2-D Simulations. - 10. The Surface Inversion Problem in Trench Isolated CMOS. - 11. Development of Isolation Structures for Applications in VLSI. - 12. Transistor Design for Submicron CMOS Technology. - 13. A Systematic Study of Transistor Design Trade-offs. - 14. MOSFET Scaling by CADDET. - 15. Examples of Parasitic Elements Simulation. - Source Information of 2-D Programs. - Table of Symbols. - About the Authors. Language: English